Brooks 5964C2MAP45KA Mass Flow Controller MFC Novellus 01-0624R-027 Working. Model No: 5964 Series. Novellus Systems Part No: 01-0624R-027. Range/Gas: 20 SLPM, N? O. This Brooks 5964C2MAP45KA Mass Flow Controller MFC Novellus is used working surplus. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.