Brooks 5964C2MAHU5KA Mass Flow Controller MFC Novellus 22-10517-01 Working Spare. Model No: 5964 Series. Novellus Systems Part No: 22-10517-01, 01-0624-024. Range/Gas: 1 SLPM, SiH4. This Brooks 5964C2MAHU5KA Mass Flow Controller is used working surplus. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.