Brooks 5964C2MALY5KA Mass Flow Controller MFC Novellus 22-10516-00 Working Spare. Model No: Series 5964. Novellus Systems Part No: 22-10516-00. Range/Gas: 5 SLPM, N2. This Brooks 5964C2MALY5KA Mass Flow Controller is used working surplus. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.